ONTOS Equipment Systems
The Winning Formula for Bonding Innovation

Traditional silicon photonics fabrication is transforming significantly, led by the innovative atmospheric plasma technology developed by ONTOS Equipment Systems. The firm, with its patented, contamination-free atmospheric plasma tools, delivers exceptional surface activation, ensuring optimal bonding for high-yield, chip-to-chip, and chip-to-wafer connections at room temperature. This expertise has established ONTOS as a trusted collaborator for players in photonics, quantum computing, and optoelectronics, empowering them to achieve breakthrough advancements.

The effectiveness of bonding in photonics relies on seamlessly integrating materials with varied physical, optical, and mechanical properties. ONTOS’ atmospheric plasma systems tackle this challenge head-on by cleaning these materials to the atomic level. The semi-automated system removes native oxides and residual organic contamination films from metallic and semiconductor surfaces. The cleaning makes the surfaces hydrophilic and capable of generating substantial surface energy for improved bonding. This translates to exceptional adhesion strength and unparalleled optical and electrical performance. Notably, the technology has bonded diverse materials, including direct bandgap materials like indium phosphide and gallium arsenide, showcasing its remarkable versatility.

“Our expertise goes beyond plasma. We are seasoned bonding veterans, crafting custom solutions that integrate flawlessly, empowering clients to unlock groundbreaking achievements,” states Daniel Pascual, CTO of ONTOS Equipment Systems.

Beyond this, ONTOS’ technology stands out from traditional vacuum plasma systems in several key aspects. The tools seamlessly integrate into existing manufacturing processes, resulting in significant cost savings, and alleviating the need for complex and expensive vacuum systems. In addition, the atmospheric plasma approach produces radical reactive species that outperforms conventional vacuum plasma by achieving deep cleaning while eliminating physical ion bombardment and particle creation. Besides, ONTOS’ atmospheric plasma systems operate reliably under ambient pressure and conditions, rendering the technology well-suited for tabletop applications and bolstering its convenience.

The firm also houses a dedicated team of bonding experts with extensive experience in the semiconductor industry and a passion for exceptional service. This combination of expertise and experience empowers the team to innovate and develop cutting-edge plasma systems while also understanding customers’ specific needs and challenges. They serve as genuine collaborators, providing tailor-made engineering solutions to maximize efficiency and efficacy.

The firm has been instrumental in transforming bonding processes for a diverse clientele across various industries, including photonics, quantum computing, and bio MEMS. Customers previously grappling with issues like failed bonds, weak connections, or unreliable performance experienced significant improvements after partnering with ONTOS. It helped clients improve bonding performance and adhesion and overcome temperature limitations that hinder bonding. Pascual also exclaims that one such proud partnership involved the tech behemoth Google, which further strengthened the firm’s position.

ONTOS’ global presence at advanced research institutions and consortiums including NIST, Fraunhofer-Gesellschaft, IMEC, and IME Singapore, is critical for maintaining their technological leadership while serving all associated companies who require critical surface preparation for bonding.

Looking ahead, ONTOS is optimistic about the future, driven by the recent launch of the ONTOS Clean system. This innovative product features a more significant form factor, integrated metrology, and expanded sample accommodation designed to address the evolving demands of the industry. In a similar vein, the firm’s dedication to continuously enhancing its bespoke engineering solutions guarantees its ability to fulfill each client’s unique requirements, solidifying its role as a valuable contributor in driving advancements across the semiconductor industry.